CAP-02

Advanced Semiconductor Fabrication

Specialty devices without a commodity process assumption.

Public record · CAP-02-001
Assigned facilities5
Related programs1
Delivery modelIntegrated
Review basisEvidence gated
Advanced semiconductor cleanroom and wafer process tools
CAP-02 · Assigned infrastructure / representative operating environment

The Foundry & Integration Complex supports low-volume semiconductor and instrument programs whose substrates, geometries, temperatures, or operating environments fall outside standard production flows. Process integration, metrology, packaging, and qualification remain attached to one article genealogy.

Engagements are organized as bounded work packages with named evidence, review, and operating responsibilities. Public summaries do not identify sponsoring organizations.

What we do

Capability through operation.

  1. 01Process integration and module development
  2. 02Advanced lithography and nanoscale patterning
  3. 03Thin films, etch, implant, and surface preparation
  4. 04Materials characterization and failure analysis
  5. 05Advanced packaging and cryogenic electronics

Evidence

Current basis.

Six-building foundry district

200 mm and specialty-substrate capability

Paired-article qualification under controlled divergence

Infrastructure

Facilities in the system.

F-20Wafer Fabrication Facility2000 Foundry RoadF-21Nanofabrication Annex2080 Foundry RoadF-22Materials Characterization Center2180 Foundry RoadF-23Packaging & Systems Integration2410 Article DriveF-24Metrology & Article Qualification2480 Article Drive